SECS-II/GEM is standard for semiconductor equipment communication. Tools: SECS Workbench, FreeSECS, Wireshark. Focus on Stream 9 for event reports. Follow SEMI standards strictly.
3 条回复
请 登录 后参与回复。
SECS-II/GEM is standard for semiconductor equipment communication. Tools: SECS Workbench, FreeSECS, Wireshark. Focus on Stream 9 for event reports. Follow SEMI standards strictly.
请 登录 后参与回复。